ITRS 2001 Factory Integration Chapter Industry Standards Backup

1. ITRS 2001 Factory Integration Chapter Industry Standards Backup

2. Production Equipment Factory Information and Control Systems Enhanced parallel I/O standard for ceiling based transporters Integrated mini-environment standards Other Systems Manufacturing Execution Systems Decision Support Systems Buffering standards for continuous operation Reticle carrier & loadport standards Standard for data formats, data access, and inter application interfaces Wafer & carrier standards Carrier environment standards Rear user- interface standards Mainstream Computer Communications stds APC, Fault Detection & Classification, Integrated metrology, EES, e-Diagnostics Process Job, Control Job standards Carrier ID standards Production Equipment (side view) Production equipment Standards for safety counter- measures Loadport standards Carrier mgt standard Utilization tracking standard Equip Eng I/F Factory Network Carrier ID standard PGV docking standards Isolation standards for equipment maintenance SECS-II GEM HSMS Enhanced parallel I/O standards Equipment footprint & height management standards Enhanced parallel I/O standard for ground based transporters Process Control standards Wafer level tracking & control standards User Interfaces Facilities Systems Material Handling Systems Work access standards to eliminate Ergo issues Cleanroom Noise Criteria standards Standards for integrated transport systems that perform both interbay and intrabay transport functions Cleanroom Temperature & RH ranges Ceiling level Stocker SEM Environment/ stds Cleanroom height standards Reticle transport systems Transport SEM Tall Stocker Bay ceiling Rear of production equipment Utility, fluids, exhaust, drains hook-up standards Wall interface standards Stocker to transporter interface standards Rear U/I Deep Stocker Transporter to loadport interface standards Stocker Standards for install pedestals, jigs/fixture for alignment Vibration stds Standards for safety counter-measures Raised floor height standards Fab levels Max weight standard Global Construction Codes Maximum move-in size stds Fab level Sub-fab standards Sub-fab level Floor running transport systems Standards for facilities systems safety counter-measures Stocker Sub-fab level Materials supply container standards Facility electrostatic levels stds Legend: -> Standards Exist -> Standards Are Under Development -> Standards Are Needed