ITRS 2003 Factory Integration Chapter Facilities Backup Section

1. ITRS 2003 Factory Integration Chapter Facilities Backup Section Details and Assumptions for Technology Requirements and Potential Solutions ITRS Factory Integration TWG

2. Backup Outline • Contributors • Facility Scope • How Metrics were Selected • Facilities Technology Requirements Table • Translating Facilities Technology Requirements to Reality • Supporting Material for Facilities Technology Requirements ITRS Factory Integration TWG

3. Bill Acorn (ACS) Mike Alianza (Intel) Hal Amick (Colin Gordon & Assoc) Jim Ammenhaeuser (ISMT) Todd Bird (CSCI) Arnold Canales (TriMega) Al Chasey (ASU) Theron Colvin (IM&AGE) Anne Elder (Intel) Carl Garrison (Hoffman Const) Ken Goldstein (CCI) Abbie Gregg (AGI) Dave Jones (Air Products) John Lake (DPR) Charlie Lynn (Fluor Corp) Joe Mattrey (M-W Zander) Mike Ohalloran (IDC) Jim Wermes (HDR) Contributors to this Section ITRS Factory Integration TWG

4. Facilities Scope • Facilities Definition • All buildings and infrastructure directly associated with manufacturing • “The biggest tool in the factory” • Scope • Building (Fab, E-Test, Probe, Labs) • Clean room • Plumbing, HVAC, Utilities and piping • Facilities support space – Subfab, Utility, CUB • Direct manufacturing people space • EHS space – scrubbers, showers, emergency response areas • Life Safety Systems – LSS • Factory Management System or BAS • Waste treatment • UPS and Power and Power Generation (outside US) • All infrastructure up to the back of the production equipment (pipes, power lines, etc.)  ITRS Factory Integration TWG

5. Pictorial of the Facility Filters, Airflow and HVAC Production Equipment (not included) Material Handling Equipment (not included) Labs Labs Central Utility Building (CUB) Support space for boilers, chillers, Ultrapure water, gases, exterior tanks, waste treatment, emissions, etc. EHS Support Mfg People Space Telecom Cleanroom Network Factory Management Systems Pipes, Gases, Plumbing Sub-Fab Support Equipment UPS & Electrical Service Mains Specialty support Utility Power Generation ITRS Factory Integration TWG

6. How Metrics were selected • Almost every metric is a best in class or close to best in class • Sources are: Rob Leachman’s published 200mm benchmarking data, individual IC maker feedback, Trecenti/UMC 300mm joint venture published data, and I300I Factory Guidelines for 300mm tool productivity • It is likely a factory will not achieve all the metrics outlined in the roadmap concurrently • Individual business models will dictate which metric is more important than others • It is likely certain metrics may be sacrificed (periodically) for attaining other metrics (Example: OEE/Utilization versus Cycle time) • The Factory Integration metrics are not really tied to the technology nodes as in other chapters such as Lithography • However, nodes offer convenient interception points to bring in new capability, tools, software and other operational potential solutions • Inclusion of each metric is dependent on consensus agreement We think the metrics provide a good summary of stretch goals for most companies in today’s challenging environment. ITRS Factory Integration TWG

7. Construction, Equipment, and Manufacturing Timeline • Metrics • Facilities: Ground Break to Area ready for 1st tool • Facilities: Ground Break to all facilities systems go • Equipment: From PO to move-in • Equipment: Area ready to 1st tool move-in • Equipment: 1st tool move-in to tool qual complete • Equipment: Qual complete to full throughput capable • Operations: 1st tool move-in to 1st full loop out Ground Break Ground Break to Area ready for 1st tool Tool install and facility systems operational 1st tool move-in to tool qual complete PE Purchase Order to 1st tool move-in Qualify complete to full throughput capable Pilot Line operating Factory Ramp ITRS Factory Integration TWG

8. Translating Facilities metrics to Reality (1) ITRS Factory Integration TWG

9. Translating Facilities metrics to Reality (2) ITRS Factory Integration TWG

10. Translating Facilities metrics to Reality (3) ITRS Factory Integration TWG

11. Translating Facilities metrics to Reality (4) ITRS Factory Integration TWG

12. Prod Equipment – Backup slides based on Facilities WG inputs Design tools to operate within mainstream facilities services capabilities Heat load removal by increased use of Process Cooling Water Drive 3-5 most important tool installation standards including pass/fail criteria test methods Predictable & consistent tool connections for Utilities, Drains, Exhaust, Interconnects Production equipment must Not be affected by use of mainstream wireless technologies (cell phones, pagers, PDA, etc) Use higher efficiency (higher Voltage not current) power distribution. (> 480V, 3 phase, today most are 208V, single phase, very high current) Side view (Prod Equip) Raised floor Physical Separation of waste streams Sub-fab space: support equipment must fit into shadow footprint as determined by prime manufacturing area (Fab/Subfab ratio <1) Shadow footprint in sub-fab See Next Page for Additional Details ITRS Factory Integration TWG

13. Feedback to Prod Equip Team from Facilities ITRS Factory Integration TWG

14. Facilities Standards Work access standards to eliminate Ergo issues Cleanroom Noise Criteria standards Cleanroom Temperature & RH ranges Ceiling level Environment/ stds Cleanroom height standards Rear of production equipment Utility, fluids, exhaust, drains hook-up standards Wall interface standards Rear U/I Standards for install pedestals, jigs/fixture for alignment Vibration stds Raised floor height standards Fab levels Max weight standard Global Construction Codes Maximum move-in size stds Legend: -> Standards Exist -> Standards Are Under Development -> Standards Are Needed Sub-fab standards Sub-fab level Standards for facilities systems safety counter-measures Materials supply container standards Facility electrostatic levels stds ITRS Factory Integration TWG

15. Vibration Criteria Curves Ref: IEST RP-CC012.1, Considerations in Cleanroom Design, Institute of Environmental Sciences and Technology, Mt Prospect, IL, pg 38 ITRS Factory Integration TWG

16. Ref: IEST RP-CC012.1, Considerations in Cleanroom Design, Institute of Environmental Sciences and Technology, Mt Prospect, IL, pg 39 ITRS Factory Integration TWG