ITRS 2003 Factory Integration Chapter Backup Material

1. ITRS 2003 Factory Integration Chapter Backup Material Agile Manufacturing Concepts ITRS Factory Integration TWG

2. Agile Manufacturing Means… • Quick turn around [*faster cycle] time for production • Quick turn around time without productivity deterioration • No productivity reduction even if many lots production formed with few wafers • Quick capability to product, scale and technology change • Quick ramp-up of equipment installation and product • Assure high productivity even if low production volume to Satisfy these Requirements… • Cost • Equipment high OEE • Product yield high at ramp-up • Speed • Product: short ramp-up time • Equipment: short ramp-up time • Product Quick Turn Around Time (QTAT) ITRS Factory Integration TWG

3. Key Potential Solutions • Full Automation • Equipment Engineering System • Fundamental technology • Single Wafer Control • Multiple lots/single wafer control in equipment module (group) • Process Control • Fault Detection and Classification • Run to Run • Integrated Metrology • Direct Transportation • Real Time Scheduling (RTS) • Supply Chain Management (SCM) ITRS Factory Integration TWG

4. More focus for agile manufacturing Resource Consumption Management Current center of interest Time dependent performance change and compensation Physical Structure base control Eq. Process control info. Eq. Process performance adj info. Module Flow Process Steps Machine-to-Machine Difference and Adjustment Target values (Recipe and major parameters) A B Eq. A Interpretation into what equipment can execute C NPW Management and Control D Eq. B Process Engineering Detailed Eq. Status info. Chamber wet cleaning and Specification Device structure Optimization Control Information Eq. Maint. and Rules Manufacturing Experience F/F APC APC and Process Control Capabilities are Key Enablers for Agile Manufacturing

5. EE Applications Relation between MES and EEC Framework for EE Capabilities EE Data Sharing APC App 1 OEE App 1 APC App 2 OEE App2 Category & Level of EE Data e-Diag App 1 FDC App1 EE Data On Demand Fire Wall Equipment Performance Integrity Continuous Monitoring Determination of EE Data EE Data Sampling & Transmission Remote monitoring Remote diagnostics Remote de-bugging/ fix Remote sensing Spare parts Mgt. EES Diagram • The Equipment Engineering System (EES) will collect data via a new, standardized interface from production equipment. This interface will be for data collection only. • Equipment Control will continue to occur through the existing SECS/GEM interface. Supplier Remote Location EES (Equipment Engineering System) • MES • Equipment Control • WIP Tracking • Factory Scheduling Global EE Data EE Data Collection And Storage EE Access Control Equipment Engineering Network Standardization of EE Data Interface Standard EE Data Interface (Logically Separated) For Data Collection Only SECS/GEM Interface for Equipment Control Factory Network ITRS Factory Integration TWG

6. Process or Metrology Equipment (side view) Control System AMHS Eqpt (side view) e-Manufacturing Hierarchy Company to Company (E-Commerce) Suppliers Company A Company B Factory to Factory (E-Factory) e-diagnostics capability firewall Factory A Factory B Within a Factory (E-Factory) Manufacturing Execution System - MES EES Equipment Engineering System Equipment/AMHS Ethernet Material Control System - MCS Station Controller ITRS Factory Integration TWG

7. (EE) The e-Business structure for manufacturing ITRS Factory Integration TWG

8. The Next Generation Factory Concept User’s SCM - Supply Chain Management Planning System ….. ….. Direct Transport ….. ….. Mfg. System Agile -Mfg. EES Wafer Level Control ….. ….. E- Diagnostic Supporting System ….. Supplier’s SCM E-Mfg. ITRS Factory Integration TWG