Status of pre-production at TESLA

1. Status of pre-production at TESLA Václav Vrba Institute of Physics AS CR, Prague Václav Vrba, Institute of Physics, AS CR

2. . • Last week TESLA finished second part of pre- production with: • 3-tile wafers and • 13 2-tile wafers  Significant improvement of yield Process flow practically the same all the time, significant changes on production line – the most pronounced one was change of manual/semiautomatic aligner for the automatic one. Václav Vrba, Institute of Physics, AS CR

3. New aligner Handling spots Václav Vrba, Institute of Physics, AS CR

4. Basic characteristics Ufd  80 V Václav Vrba, Institute of Physics, AS CR

5. Basic characteristics (cont) Iox @ 50 V  100 pA Václav Vrba, Institute of Physics, AS CR

6. Basic characteristics (cont) Significant improvement of leakage current ! 3-Tiles - New delivery Good Tiles - Old delivery Václav Vrba, Institute of Physics, AS CR

7. Basic characteristics (cont) Diode with Guard ring P-spray doses Václav Vrba, Institute of Physics, AS CR

8. Delivery According contract: 11 3-tile wafers 2 2-tile wafers 1 2-tile wafer (Prague, replacement of nonconform.) 1 2-tile wafer (NM, broken) Additionally available: 2 3-tile wafers 9 2-tile wafers Václav Vrba, Institute of Physics, AS CR

9. Conclusions • TESLA finished second part of the pre-production with significant improvement of the yield and the quality of sensors Václav Vrba, Institute of Physics, AS CR