Welcome to The NanoFabrication Cleanroom Safety training Course

1. N E Welcometo The NanoFabrication Cleanroom Safety training Course

2. N N E E Center for Nanoscale Science and EngineeringBourns Hall B121Nanofabricaton Cleanroom General Safety, Hazardous Chemical and Materials Safety Training Course

3. N E Organization Center for Nanoscale Science and Engineering - Director - Dr. Robert Haddon MSO - Nancy Jahr NanoFabrication Lab Manager -Mark Heiden Staff Members Dr. Dong Yan - Senior Development Engineer Briana Tran – Cleanroom Assistant

4. N E CNSE Nanofab Cleanroom Safety Statement The CNSE management will conduct its operations in order to provide for the safety of the users and the protection of the equipment. Safe operations will be the first priority in all cleanroom activities. All users are responsible for safety in their respective experiments and lab equipment usage. No task is so important and no experiment is so urgent that we can not take the time to perform safely.

5. N E Safety Presentation Outline • Laboratory Overview • General Laboratory safety and protocol • Handling Hazardous Chemicals • Handling HF (Hydroflouric Acid) • Handling Hazardous Gases • Alarms and Emergency Evacuation

6. N E Laboratory Overview • Cleanroom Facility is appox. 2,000 sq.ft. • Class 100/1000 areas • Photolithography • Wet and Dry Etching • Dielectric Deposition • Metal Deposition • Film profile and Device characterization

7. N E CNSE Nanofab Cleanroom Who would be affected if you have an accident in the lab while performing a experiment? You can affect • The people working with you in the lab. • The Equipment. • The People in the building. • The University. • Riverside Community and there families.

8. N E General Lab Safety and Protocol • Never work at chemical benches alone; there must be at least two trained users present at all times when using hazardous chemicals. (This applies to after hours as well) • Do not use any equipment that you have not been trained on. • Do not operate any equipment in an unsafe condition. • Notify staff of any unsafe or hazardous condition.

9. N E General Lab Safety and Protocol Lockout Tag Out • When a lockout tag out tag is placed on a piece of equipment, do not power up the equipment or attempt to use the equipment. Warning and Caution! • When working with Hot Plates and Ultra Sonic baths. Make sure you know the flash point for the chemical you are heating. (See MSDS sheets) • Make sure you are aware all signs, postings, emergency equipment and labels in the lab.

10. General Lab Safety and Protocol N E

11. N E General Lab Safety and Protocol Types of Fire extinguishers

12. N E General Lab safety and Protocol National Fire Protection Agency (NFPA) LABEL Color Bar Red- Fire Yellow- Reactive Blue- Health hazard White-Specific hazard

13. N E General Lab Safety and Protocol Applicable Safety Agency and Programs OSHA – Occupation Safety and Health Administration EPA – Environmental Protection Agency DOT – Department of Transportation UCR EH&S – Environmental Health and Safety Local Fire Department, HAZMAT team

14. N E General Lab Safety and Protocol Eye Safety Wear eye Protection • When exposing deep UV light sources for Photoresist films on the mask aligners. • When working with Etch and Deposition Tools; E-beam evaporator, Thermal evaporator, Sputtering tool and Etch Plasma tools. • When working with chemicals and Lasers.

15. N E Handling Hazardous Chemicals Material Safety Data Sheets (MSDS) • Read and Understand MSDS Sheets. • MSDS sheets provide safety data for all known chemicals throughout the industry. • All chemicals must be approved by staff and MSDS sheet must be added to the Cleanroom MSDS book.

17. N E Handling Hazardous Chemicals • Any user wishing to use hazardous materials or chemicals must have process specific training. • Always wear gloves when handling chemicals. • Always wear safety glasses when handling chemicals. • Chemical-resistant gloves, nitrile gloves, face shield, apron and closed to shoes must be worn when pouring acids or any harmful chemicals. • Chemicals must be poured under fume hood.

18. N E Handling Hazardous Chemicals Understand the dangers of the chemicals you are working with and that are around you. • Know their flash points. • Reactivity. • Exposure effects\ Health hazard.

19. N E Handling Hazardous Chemicals Acids and Bases • Always wash hands after handling chemicals. • When diluting strong acids, it is generally safer to add acid to water. • All chemicals must be clearly labeled. • All acids are disposed of by slowly pouring into acid bench drain or removed by aspirator tube. • All bases are disposed by slowly pouring into base bench drain or by aspirator tube.

20. N E Handling Hazardous Chemicals Solvents • All Solvents are disposed into solvent bench drain sumps. Call staff if sumps become full. • Never mix Acids or Bases with solvents • Never use or leave solvent squirt bottles on the Acid or Base wet benches • Never put Acid or Base into squirt bottles • Empty bottles should be rinsed with water three times and labeled “rinsed” on the bottle.

21. N E Handling Hazardous Chemicals Empty Bottle Disposal • Empty bottles should be rinsed with water three times and labeled “rinsed” on the bottle. • Do not discard empty chemical bottles. (Staff will dispose of all empties)

22. N E Handling Hazardous Chemicals • Always use beakers made of appropriate material for chemicals used and temperature. • All containers with chemicals must have a label with chemical name and owner contact information. • Do not leave unlabeled containers in the fume hoods. Used chemicals must be disposed of immediately. • Get approval from NanoFab staff before buying or ordering a chemical. Do not show up with chemical in hand and expect instant approval. • Do not dispose of contaminated materials or glass in the regular trash. Special ziploc bags are provided under each bench.

23. N E Handling Hazardous Chemicals Each person handling hazardous chemicals in the laboratory shall know the location of the closest: Emergency showers Fire extinguishers Eye washes Telephones First aid kit Fire pull stations Emergency exits Spill kits In an emergency, dial 911 from a campus phone.

24. N E Handling Hazardous Chemicals Eye Wash Station

25. N E Handling Hazardous Chemicals Safety Shower

26. N E Handling Hazardous Chemicals Chemical List Sulfuric acid Ammonium Flouride Nitric acid Hydroflouric acid Hydrochloric acid Phosphoric acid Acetic acid MIBK Acetone Photoresist Isopropanol Ammonium Hydroxide Hydrogen Peroxide

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28. N E Handling Hazardous Chemicals • For small spills use spill kit on all liquids except Hydrofluoric Acid. • Large spills, evacuate the area immediately and notify staff. • Chemical exposure to skin: Remove clothing wash immediately in shower; then cover yourself with blanket. Call for help! • Chemical exposure to eyes: Rinse eyes in eye wash for 15 minutes. Call for help.

29. N E Handling Hydrofluoric Acid Hydrofluoric acid (HF) is one of the strongest inorganic acids and one of the most DANGEROUS ACIDS to work with. Double gloves are always required. Chemical resistance gloves are required over Nitrile gloves .

30. N E Use of HF and BOE in NanoFab • NH4F MSDS DATA

31. N E Handling Hydrofluoric Acid Allowed location for HF and BOE

32. N E Handling Hydrofluoric Acid Exposure to Hydrofluoric (HF) • For splash: 1. YELL FOR HELP! – Stay calm. 2. Go IMMEDIATELY to a shower (or sink) and wash contaminated area with water. 3. Remove contaminated clothing while washing. 4. Wash until all acid is removed from surface (limit washing to 5 minutes). 5. Dry area quickly and apply calcium gluconate gel to affected area and massage into skin (wear gloves). Do this until medical help arrives. 6. If HF is under nails, try to scrub the calcium gluconate underneath * If you are alone dial 911 at this point . • If in eyes: Hold eyes open and rinse in eyewash until help arrives – Do not use calcium gluconate gel in the eyes. • If inhalation: Get victim to fresh air. If a first responder is there they should administer oxygen. • ** HF burn victims must always get medical treatment **

33. N E Handling Hydrofluoric Acid (HF) Use of HF and BOE in NanoFab • HF/BOE is extremely dangerous and can cause severe burns and even death. • HF/BOE attacks bone tissue by reacting with calcium in the bone. • HF/BOE attacks most organs including the heart by disrupting Ca ions. • HF/BOE in dilute concentrations may not even cause any pain initially but is easily absorbed through the skin to attack bone and other tissue.

34. N E Handling Hydrofluoric Acid (HF) Use of Personal Protective Equipment (PPE) PPE is required for HF or Buffered Oxide Etch (BOE) use: • Rubber or plastic apron. • Gloves • Double gloves with nitrile exam gloves. • Heavy, long sleeved neoprene or tripolymer gloves OVER nitrile exam gloves. • Face mask in conjunction with a fume hood sash. • Closed toed shoes. • Long pants.

35. N E Handling Hazardous Gases Cleanroom Hazardous Gases List Silane Sih4 CHF3 H2 SiH2 Cl2 CH4 CF4 BCL3 SF6 HBR N2O CL2 NH3 SiCl4 O2

36. N E Handling Hazardous Gases Gas Characteristics Explosive Toxic Flammable Combustible Corrosive

37. Handling Hazardous Gases Typical automated cabinet • Connected to automated gas detection system. • Earthquake alarms and shuts off flow of gas. • Excess gas flow (leak) alarms and shuts off gas. • Process gas lines are double contained (Coaxial) and leak tested. • Automated procedure for bottle change (All bottles are to be changed by staff ONLY!) • Notify Staff immediately if a process fails due to inadequate gas delivery or if any alarm sounds.

38. N E Handling Hazardous Gases • Do not override any safety features on tools • Toxic gas alarm system must remain activated. • No cabinet should be over-ridden. • All process recipes must be approved by staff • Do not operate a tool with hazardous gas in an improper manner. • If a cabinet alarms call staff immediately.

39. N E Alarms and Emergency Evacuation • Toxic Gas Alarm- siren and green flashing strobe. EXIT LAB IMMEDIATELY • Fire Alarm- High pitch white flashing strobe. EXIT LAB IMMEDIATELY • Contact Staff at numbers posted outside lab

40. N E Alarms Emergency EvacuationLocal Alarms • Wet Bench Alarms- Audible tone Go to bench (Silence/Reset Alarm) Call Staff if necessary. • Tool Alarms- Audible tone. Go to tool, (Silence/Reset Alarm) Call Staff if necessary. • Gas Cabinet Alarms- Audible tone- Call Staff Immediately. Do Not Approach Cabinet. • Scrubber Alarms- Audible tone- Call Staff.

41. N E Alarms and Evacuation NanoFab Cleanroom Layout Emergency Exit Routes