1 / 2

Thermoplastic NIL of P(VDF- TrFE -CFE)

Thermoplastic NIL of P(VDF- TrFE -CFE) . Si chips are cleaved and cleaned Spin-coating of OmniCoat on Si Spin-coating of P(VDF- TrFE -CFE) on OmniCoat The Si stamp is silanized Optical alignment performed Heating and compression The upper chip is removed

ramya
Download Presentation

Thermoplastic NIL of P(VDF- TrFE -CFE)

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript


  1. Thermoplastic NIL of P(VDF-TrFE-CFE) • Si chips are cleaved and cleaned • Spin-coating of OmniCoat on Si • Spin-coating of P(VDF-TrFE-CFE) on OmniCoat • The Si stamp is silanized • Optical alignment performed • Heating and compression • The upper chip is removed • Release in water of free standing micro patterned membrane J. Shklovsky, L. Engel, Y. Sverdlov, Y. Shacham-Diamand, S. Krylov, Microelectronic Engineering, 2012

  2. Thermoplastic Nano-Imprinting Lithography of P(VDF-TrFE-CFE) Silicon Stamp Patterned polymer Silicon Stamp Patterned polymer J. Shklovsky, L. Engel, Y. Sverdlov, Y. Shacham-Diamand, S. Krylov, Microelectronic Engineering, 2012

More Related