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Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective

Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective. Udayan Ganguly June 10, 2014. Collated based on discussions with Saurabh Lodha , Swaroop Ganguly , Bipin Rajendran , Souvik Mahapatra , Anil Kottantharayil , V Ramgopal Rao, Juzer Vasi.

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Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective

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  1. Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective UdayanGanguly June 10, 2014 Collated based on discussions with SaurabhLodha, SwaroopGanguly, BipinRajendran, SouvikMahapatra, Anil Kottantharayil, V Ramgopal Rao, JuzerVasi

  2. Agenda Policy Goal: To enable academic training to address national challenges and achieve international excellence Academic training infrastructure must respond to evolving national interests U Ganguly Assocham 2014

  3. Outline • Mission and Vision • Nanoelectronics Research Evolution @ IITBNF • Key Achievements • IITBNF Organization and Operational Highlights • Future of Nanotechnology @ IITB – A Proposal U Ganguly Assocham 2014

  4. IIT Bombay Nanofabrication Facility “I have been extremely impressed … one of the leading universities in the world in the field of technology” - Mr. Joe Biden, July 2013 250 Crores ($ 50M) facility More than 300 researcher students & 66 faculty members

  5. Mission & Vision Create a research platform to facilitate hands on experiments Establish strong connection between science and technology Bridge gap between research and commercialization Encourage users from other Departments (IIT Bombay) and other Institutes to avail experimental facilities

  6. IITBNF outreach and national service ITRS JEDEC • Standards and Roadmap Hands-on Workshops & Research Project Support First Certification course on Semiconductor Manufacturing Indian nanoelectronics users’ programme (INUP) National Policy on Electronics (NPE) 12th National Plan (R&D Center) Nanosniff Powai Labs IITBNF plays a strategic and academic role U Ganguly Assocham 2014

  7. Timeline & Funding of IITBNF Centre for Excellence in Nanoelectronics (CEN), DeitY, 50 Cr CEN, DeitY, 80Cr Infrastructure - IITB, 15 Cr Sponsored projects - R&D Organizations (~ 58 Cr) INUP DeitY, 12 Cr NCPRE MNRE, 45 Cr INUP 35 Cr Industrypartners (Intel, TSMC, IBM, TI, Micron, Synopsys, Maxim, Renesas, 7.5 Cr) Equipment donation - Nanomanufacturing Lab, CLEAN Lab (~ 32 Cr AMAT) Sponsored projects (7.5 Cr AMAT) 2009 2010 2011 2012 2013 2006 2007 2008 U Ganguly Assocham 2014

  8. Infrastructure timeline Ellipsometry, PL, AFM TEM Prep Magnetic XPS, XRD CEN, DIT, $10M Materials SEM, Hall, Four-Probe UV-Vis, FTIR, SECM PPMS PLD, PVD/CVD, Evaporation, Sputter MBE ALD Litho (photo, eBeam) CMP Device Fab PIII IITB, $ 3M Comb Sputter AMAT etch, gate stack Magnetic DC, AC, pulsed Cryo Device Char RF, ns pulse Optical Process & Device (Elec) MultiPhysics Sim Ab-initio 2009 2010 2011 2012 2013 2006 2007 2008 8 U Ganguly Assocham 2014

  9. Expertise timeline GaN NC/CT Perovskites Gate Dielectric CEN, DIT, $10M Biomaterials Ge Materials Graphene, 2D Materials GaAs Organics ReRAM Solar Cell HEMT Biosensors MOS Stacks Quant/Neuro Gr Flash Spintronics Organics Device Fab Cantilevers IITB, $ 3M IR sensors Si, GeCMOS FETs LED CHISEL Flash Micro sec Pulsed Cryo Device Char BTI SONOS, CT ns Pulsed DLTS FINFET Quantum MultiPhysics FLASH, ESD BTI Sim 2009 2010 2011 2012 2013 2006 2007 2008 9 U Ganguly Assocham 2014

  10. National outreach – the INUP program Facility open to researchers all over the country

  11. Research Output and Achievements • Papers in High Impact Journals (2006-2013): >200 • IEEE Transactions on ED, Nanotechnology, IM • IEEE EDL • AIP APL, JAP • ACS Nano • J-MEMS • Organic Electronics • IOP Nanotechnology • Presence in top international conferences • Logic and Memory Devices • Photovoltaics • Spintronics • MEMS • Material Growth PV Logic and Memory Devices MEMS Spin Materials Growth Simulation IITBNF enables high impact research in diverse areas U Ganguly Assocham 2014

  12. Product Development More than 40 National and International Patents Filed Silicon locket for cardiac diagnostics Cantilever based low cost explosive detector Explosive detection by Fluorescence Quenching Wireless sensor node for explosive detection Lab on chip for cardiac diagnostics Low cost portable SPR

  13. IITBNF Organizational Structure Professionally run national facility with 24x7 operation U Ganguly Assocham 2014

  14. Transparent 24x7 open access: online slot booking Covers ~ 90 tools @ IITBNF Software to be adopted by NNF @ IISc U Ganguly Assocham 2014

  15. Lab and Personnel Safety Spill Kits, First Aid, Eye Showers at multiple locations Fire extinguishers in all lab and corridors 32 Toxic Gas Detectors Auto-shut OFF 45 min Backup 2009 2010 2011 2012 2013 2007 2008 2006 • Emergency Response Team (24X7) • PA System • Biometric access for head counts in Emergency • Regular safety drills • New materials go through rigorous safety checks U Ganguly Assocham 2014

  16. Issue logging & tracking: building maintenance Jun 12 Jun 13 Jul 13 IITBNF EE Scalable, online ticketing and tracking Data-driven approach to identify and track issues Now adopted for IITB campus-wide maintenance U Ganguly Assocham 2014

  17. How are we doing? “The fact that so many of my students are able to use the facility on a regular basis, basic training is provided to them and they are made aware of the safety issues, etc. speaks volume about how the facility is maintained, and open to others for use…Thanks for being generous and allowing others to use the unique facilities!” – Prof.AmitAgrawal(Mechanical) “Easily allowing interested people to use the facility, which significantly enhances the utility of the installed facilities.” – Prof.Dipti Gupta (MEMS), on highlights of IITBNF “From the point of view of an user I find that the facility is administered very professionally. Online slot booking system, billing details, issue of consumables, etc. are very transparent.” – Anonymous faculty, on highlights of IITBNF C “We have never faced any difficulty in accessing any facility.” – Anonymous faculty A B “The facility caters primarily towards electronic device fabrication. However, there is an increasing number of users in the institute who are working at the interface of physics/engineering and biology and would like to use the IITBNF facility. Therefore, it will be good to have dedicated a few soft lithography equipments to avoid potential contamination issues.” – Anonymous faculty “Uniqueness is the accessibility aspect…Simply register and things happen as they should. I am happy as my students have not cribbed till date about something not made available to them.” – Anonymous faculty, on highlights of IITBNF “Some processes need to be opened for all users irrespective of the substrate they are using.” – Anonymous faculty U Ganguly Assocham 2014

  18. Faculty and Student Participation Strong inter-disciplinary focus and open access U Ganguly Assocham 2014

  19. EE Nanoelectronics Growth ~4X Growth ~2X Growth From 8 to 29 Faculty over 10 years From 10,000  20,000 sq. ft. in 10 years Similar growth across institute; Increased cross-disciplinary research U Ganguly Assocham 2014

  20. What should the future look like? Stanford Nano Center Birck Nanotechnology Center, Purdue • A greenfieldmade-to-custom 200,000 sq. ft center: 20+ years vision 2018-2040 • An INTEGRATED IIT Bombay Nanotechnology Center • 40,000 sq. ft. (approx) ground floor clean room space, allied specialty nano-labs • Faculty, technical staff and graduate student offices • Technology Incubation and Entrepreneurship CENSE, IISc A State-of-the-art Nanotechnology Center U Ganguly Assocham 2014

  21. India’s Need for Semiconductor Manufacturing Electronics production value chain Source: Applied Materials • Semiconductors are the basic building block for all electronics products • 25-30% of product value (even higher for PDA, Tablets, Mobile Phone etc.) • Semiconductor fabs are a catalyst for development of large number of downstream electronics industries • Significant driver for employment growth Design + Manufacturing = Products Two India Fabs approved by union cabinet in 2013; Strong need for semiconductor manufacturing to increase electronic production U Ganguly Assocham 2014

  22. Sustaining a Semiconductor Ecosystem -Role of Academia Example: Semiconductor Tech & Manuf. Course Training & R&D are two key areas where academic institutions and industry have a major role to play 1,500 specialists & 10,000 related skilled jobs/fab Example: IMEC (Belgium), ITRI (Taiwan) Source: Applied Materials, CP presentation 2012 U Ganguly Assocham 2014

  23. http://www.itri.org.tw/eng/econtent/about/about05.aspx R&D Organization Value: ITRI Time horizons > 10 years Initiation: In 1973, three R&D institutes form a private company Industrial Taiwan Research Institute Technology core: 1976 RCA tech transfer and training Corporations Incubated: 163 UMC (1980); TSMC (1987)- Largest foundry Taiwan Mask Corp (1989); Mirle Automation (1989) Epistar Corp (1996): supply chain Phalanx Biotech (2002); Del Solar (2004); Daily Care Biomed (2004); Products: 14000 Patent IBM compatible PC (1983); Carbon Fibre Bicycle, rackets (1985); TFT Display; CD ROM; Std First common car engine, WiMAX, FlexUPD; Standard Labs: National Measurements Lab; Fire and Explosion Lab Indigenous 8” tech. & Mirle Automation Del Solar Acquired 4” technology Epi Star Supply Chain TSMC UMC Growth in various core/ non core segments Long time horizons > 10 years ITRI has played a vital role in transforming Taiwan’s economy from a labor-intensive industry to a high-tech industry. World Leader by 2010 Top 100 world R&D awards: 4 Wall Street Journal Technology Innovation: 3 Imported Tech/knowledge  Do It Yourself  Innovation: Culture of Leadership; U Ganguly Assocham 2014

  24. R&D Centers History and Geography Recent Intel Ireland fab Major corporations strongly partner with multiple University lead prototyping • Drivers for R&D Center • - Corporation provide mid term technology vision & highlight opportunities • - Ensure quality of research • Provides consistent cost sharing (vis a vis start ups) • Future employment path to trainees • Funds/support for disruptive tech incubation • Drivers for Corporations • - Corporate Research is expensive: • - Hedge against low probability disruptive technologies • Pre-competitive research cost sharing • Human Resource development – “A company is as good as its employees” R&D Center “canopy” is essential for sustainable Fab/Semiconductors ecosystem U Ganguly Assocham 2014

  25. R&D Organization Sustainability IMEC (1982- present) AIST (2001-present) Funding (Million €) % grant of revenue 53% support in 10 years 22% support in 20 years Year http://www.aist.go.jp/aist_e/about_aist/facts_figures/fact_figures.html 10 year grant: 189M€ = 130Cr INR (http://www.imec.be/ScientificReport/SR2007/) AIST from Japan shows a similar 60% subsidy after 10 years of operation. IMEC used 189Million € (~1300 Cr INR at 69 INR=1€) of subsidy and 315 Million € of revenue over initial 10 years. From 10 to 20 years, subsidy percent reduces from 60 -22% (essentially non-subsidy revenue increase) U Ganguly Assocham 2014

  26. Nano-EngineerngEcosystem Model Barrier to Materials / Tech Flow (e.g. 4” vs 12”, clean) h/w Tech. Concept /IP Materials/Process High Tech Human Resources Strong need for a connecting entity between Research and Manufacturing U Ganguly Assocham 2014

  27. Proposed R&D Center Model Broad user base around standard baseline Broad Stakeholders Technology Focus & Diversity Multiple technology development focus – what to prioritize? Multiple stakeholders – how to engage? U Ganguly Assocham 2014

  28. Organizational Structure Board Representing Major Stakeholders e.g. CEO, President DeitY Fab DRDO/ISRO/DAE Industry Academia Temporary Temporary • Permanent CEO must have international experience in managing large R&D Labs/Centers Staff preferably have strong background in semiconductor industry or large R&D labs R&D Center must be autonomously & professionally managed with vision from stakeholders U Ganguly Assocham 2014

  29. Prologue SEMI and IESA industry forum to develop ecosystem consensus with GoI Leadership A globally time-tested R&D model needs to be implemented to support the bold vision of Indian semiconductor manufacturing and innovations U Ganguly Assocham 2014

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