2012 Summer ITRS Environmental/ Safety/ Health TWG Update San Francisco , CA USA

1. 2012 Summer ITRSEnvironmental/ Safety/ Health TWG Update San Francisco, CA USA July 12, 2012

2. Environmental, Safety & Health TWG Dave Speed (IBM) Shane Harte (ESIA0 Nausikaa van Hoornick (IMEC) Fiona Lyons (Intel) Harry Thewissson (NXP) Alain Pardon IMEC) Mario Chen (DuPont) Deb Kaiser (NIST) Kurt Werner (3M) Reyes Sierra (SRC ERC) Jim Field (SRC ERC) Srini Raghavan (SRC ERC) Slava Libman (Air Liquide) Paul Connor (Dow) Pete Trefonas (Dow) Tom Huang (SEMATECH) Dan Herr (UNC-G) Laura Mendicino (Freescale) Steve Brown (Intel) Hsi-An Kwong (ISMI) Chris Lee (TI) Andreas Neuber (AMAT) Mary Majors (APCI) Masahiro Takemura (NIMS) Leo Kenny (Intel) Alan Knapp (Siemens) Dave Maloney (Intermolecular) Terry Francis (Matheson) Reed Content (GF) Francesca Illuzzi (Micron) Steve Tisdale (Intel) Hans-Peter Bipp (Infineon) Steve Moffat (AMAT) SJ Ko (Hynix) Laurie Beu (SEMATECH) Bob Helms (UT Dallas) Walter Worth (SEMATECH) Mike Garner (Stanford) Gopal Rao (Intel)

3. Key messages • No major changes to the 2012 roadmap • 2011 represented a transition year for the ESH Roadmap • Streamlining of requirement tables (strategic emphasis) • Significant increase in team membership, broad representation • Emphasis on proactive, integrated approach, leveraging the technology expertise of the industry • Sub-team groups within ESH created to interface with key TWGs • Green/sustainable chemistry/engineering concept moving to implementation phase, to enable 2013 roadmap re-write • Ongoing look-ahead on key trends for the regulatory/compliance landscape • Standards mapping, interface and development (SEMI)

4. ESH Scope and Drivers Factory Emissions, Safety Production Equipment Natural resource usage Materials Suppliers/products Product Materials Assembly & Test Fab/ Sort Product End of Life Site operations • ESH is driven by site operations, product content, supply chain, brand impacts, regulatory requirements and natural resource usage • Ensure that long term technology development is not gated by EHS issues • Leverage unique industry technologies to proactively meet EHS challenges • Employ the concept of green (sustainable) chemistry and engineering as a framework methodology • Fully maximize opportunities for ESH innovation in critical areas

5. What has changed? • Greater focus on green manufacturing and sustainability • Proliferation of legislation, regulations • Variations on common themes (REACh) : differences across geographies • Cost, IP and brand impacts • Differences in metrics and standards • From US driven to an array of regulatory sources • An emphasis on the global view across supply chains, in addition to local site requirements • Broader view of ESH (in the context of sustainability, governance and social responsibility) • More complex materials are requiring increased development time, cost and EHS control measures

6. ESH iTWG Roadmap Strategies Existing • Understand (characterize) processes and materials during development phase • Use materials that are less hazardous or whose byproducts are less hazardous • Design products and systems (equipment and facilities) that consume less raw material and resources • Make the factory safe for employees and the communities where we operate Additional focus • Integration of Green Chemistry Principles into the ITRS • Proactive engagement with stakeholder partners and customers to reset strategic focus of the roadmap

7. Green (sustainable) Chemistry Principles* Prevent waste Maximize atom economy Design less hazardous chemical syntheses Design safer chemicals and products Use safer solvents and reaction conditions Increase energy efficiency Use renewable feed stocks Avoid chemical derivatives Use catalysts, not stoichiometric reagents Design chemicals and products that degrade after use Analyze in real time to prevent pollution Minimize the potential for accidents * Anastas, P. T. and Warner, J. C. Green Chemistry: Theory and Practice, Oxford University Press: New York, 1998.

8. Integrating Sustainable/Green Chemistry Methodology = An ongoing, proactive engagement across the process/product life cycle World Semiconductor Council Influencing future legislation, regulations Degree of influence Cost Sponsored Research, consortia Suppliers ITRS Green Chemistry methodology DfE (TD thru tech Transfer/ramp) Materials Risk assessment Concept development Internal or external Research Exploration Pathfinding, Architecture Development HVM, Production Process, Product Development +15 yrs 2-3 yrs Today 4-6 yrs

9. Summary No major changes to ESHtables/Potential Solutions • Potential changes being logged and will be updated in 2013 Discussion with key TWGs • ERM: • New insertion matrix table (detailed) for prioritization • GC WP for Winter Meeting to define methodology guidelines for TWGs • Factory Integration: • Joint inputs for new tool requirements • Metrology (new scope): • Drive advanced characterization for new materials, waste stream re-use/recycling • Lithography: • Driving resource conservation for EUV • FEP: • Wet cleans, maintenance, exhaust chemical impacts with III-V • Interconnect: • Focusing on process specific issues • Assembly & Packaging: • Evaluating ESH impacts for new packaging materials

10. Back-up 2011 ITRS Factory Integration

11. Goal for adopting green chemistry Ideally, green chemistry would provide a sustainable framework across our industry technology life cycle, maximizing the viability of the materials we use and ensuring that due diligence on ESH mitigation begins at the outset of chemical design

12. New Materials Challenges • Introduction of new materials requires new process chemicals • New Deposition chemicals • Plasma etch chemistries • CMP Chemistries • Cleaning Chemicals • ESH Practices Needed for New Materials & Chemicals • Assessing Chemistries with “Green Chemistry” Methodology (appropriate to the relevant technical scope)