MEMS Dynamic Microphone Design and Fabrication
MEMS Dynamic Microphone Design and Fabrication. Abbigale Boyle, Steven Crist, Mike Grapes, Karam Hijji, Alex Kao, Stephen Kitt, Paul Lambert, Christine Lao, Ashley Lidie, Marshall Schroeder. z-component of magnetic flux rectangular magnet 50 μ m x 50 μ m x 25 μ m, 0.5 T.
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