RIE/ICP=30/1500 W
RIE/ICP=30/1500 W. RIE/ICP=50/1500 W. 36.8 um in 10min. 33.1 um in 10min. RIE/ICP=70/1500 W. RIE/ICP=100/1500 W. 37.4 um in 10min. 35.7 um in 10min. Other parameters are fixed as: Temperature 15’C, P ressure =30mTorr, SF6=80sccm, Ar =10sccm, Time=10min. RIE/ICP=70/1500 W for 24min.
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