Weekly Group Meeting Report

1. Weekly Group Meeting Report Renjie Chen Supervisor: Prof. Shadi A. Dayeh

2. Summary • For neural probe samples: -- A new batch of 6 samples, with metal stacking (Ti/Ni/Ti/Ni=30/200/30/50), have been fabricated. These samples were bonded with 70um Si pieces, and were sent back to school for Si thinning. -- The previous batch of samples were processed with Ni dots writing. Even though the sample surface wasn’t clean enough last time, but the Ni dots look ok through microscope. • For InGaAs samples: -- The layout of the Ni-InGaAs diffusion fin channels was re-designed, and the EBL writing sequence . -- Three set of new samples were under fabrication, and the 2nd EBL writing for fin structures has been finished.

3. Annealing modification Previous test with Si holder: Planned test with SiC holder:

4. ProcessofNi-InGaAsDiffusion Study Process 1st EBL - Markers 2nd EBL – Fin 3rd EBL – Ni Source • Only InGaAs <110> & <100> orientations are present in the new design • More fin widths are included in one set of fins • The EBL writing sequence was also changed

5. 68 32 147 89 81 475nm 286 186 95 61 52 45

7. Three Samples in Process Sample 1 -- 8 units, the fin writing was not so good -- will be used for annealing time test Sample 2 -- 8 units, the fin writing was good -- will be used for 250’C annealing study Sample 3 -- 12 units, the fin writing is under process -- will be used for 300’C annealing study

8. Plan • Prepare another two set of InGaAs samples -- two InGaAs samples with 8 units, in case of problems during the process -- There two set of samples can be used for 275’C test, and 325’C if both work • Carry out the annealing to existing two set of samples -- 250’C and 300’C diffusion study -- SEM, AFM characterization

9. Thank youQ&A