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TEAM Microscope Engineering Planning

TEAM Microscope Engineering Planning. Norman Salmon Engineering Program Manager Seung-Kil Son Ph.D. Staff Mechanical Engineer December 12, 2003. Areas of Engineering Effort 2004-2007. FY2004. FY2005. FY2006. FY2007. Concept Engineering. Design/Engineering. Analysis. Fabrication.

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TEAM Microscope Engineering Planning

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  1. TEAM Microscope Engineering Planning Norman Salmon Engineering Program Manager Seung-Kil Son Ph.D. Staff Mechanical Engineer December 12, 2003

  2. Areas of Engineering Effort 2004-2007 FY2004 FY2005 FY2006 FY2007 Concept Engineering Design/Engineering Analysis Fabrication Instrumentation and Metrology

  3. Critical Path for Concept Engineering and Stage Specifications Initial Specification Building Microscope Geometry Mechanical Design Cooling Systems Sensors Thermal Analysis Electrical Systems Actuators Controls Metrology Materials Fabrication Reset Specification Q1 2004

  4. Additions to the Original Scope of Work Facilities/Building Impact Microscope Design TEAM Stage Cooling System Materials Be/Ceramics Automated Sample Loading With Load Lock 62 Machine Shop U of Ill - TEAM Stage Cartridge and On Stage Experiments

  5. Projects and Funding that can help support an expanded scope of work • KITECH (300K for FY2004 - ??) • Miquel Salmeron - MF • Alex Zettle (Shaul) • David Dornfeld • Support in Equipment for Building 62 Shop (500K) • Support in Students and Post Docs to strengthen/reduce cost of fabrication support • Prospects • Potential Visiting Professor from Korea in PZT and Sensors (March 2004) • Paul Wright /Chris Talbot Applied Materials

  6. Proposed Shift in Funding

  7. Engineering Effort

  8. Engineering Costs • Setting up a fabrication account is essential • General and Administrative • 46.5% GR1 • 20.6% Fab • Detail budget should be submitted to NCEM January 1, 2004 based on limitations of scope of work

  9. TEAM Project Management • MS Project • Tracking of Resources • Resource Conflicts • Budgeting • Time Lines • Unique UC Numbers for Sub-accounts to track specific project areas

  10. Current Project List

  11. Stage Concept Sketch with Autoloader

  12. Specifications Currently Set • Drift Specification • Dream #: 1Å / 10 mins – applications Lorentz (single spins – 1000 secs), EFTEM (for 1Å Resolution may need 5 mins exposure) • Minimum acceptable: 0.5 Å / 1 min • Present standard is 2 Å / min, so the existing minimum is almost sufficient, but we’d really prefer to do better • This is for x, y and z • Eucentricity • Very desirable to make any point eucentric via software control as opposed to only having only one point in space that is eucentric. • Would represent an incredible improvement for the operator

  13. Specifications Currently Set (Continued 1) • Range • Coarse Travel • x & y = 2 mm • z = Dream spec 3 mm (if designing for bigger gap microscopes, TEAM II+), minimum z = 0.5 mm for TEAM I • Note that this constraint is largely based on present 3 mm disc size – practical reason, not an engineering • Resolution of coarse motion: • Generally want 10 times overlap of coarse motion to fine – this dictates about 10 nm • Range over which fine travel is in existence: 10 µm (or better) • Resolution of fine motion:30-50pm

  14. Specifications Currently Set (Continued 2) • Repeatability • 5 times worse than resolution – thus, that means 250 pm (0.25 Å) • Precision • 10 times worse than resolution – that’s then 500 pm (0.5Å) • Repeatability between microscopes • It was noted that doing this very successfully would be very beneficial in terms of justifying use of two columns instead of one column. • Kinematic joint for cartridge between microscopes – goal is to be able to analyze the same nanoparticle in both the TEM and STEM columns • Repeatability resolution 250 nm coarse motion (maybe better) • Want an optical method for fine positioning • Needs to be discovered what we can expect for resolution on this, what software exists • If better than 10 nm we’re very happy

  15. Specifications Currently Set (Continued 3) • Rotations • Specimen stage: ± 20 is minimum, 45 is preferred, 70 is desired • Resolution: 100 µrad • Discussed in terms of requirements for TEAM I & beyond TEAM I. • Likely that TEAM I will need only 20 for routine use • The additional tilted need for tomography will almost have to come from a special cartridge design • Speed • Worth considering, but not a priority but a convenience • Obviously, faster is better • Shoot for 1 rpm

  16. Specifications Currently Set (Continued 4) • Cartridge • Types of samples: 3mm disc, FIB, MEMS • Sample Size: 3 mm disc as standard • Reason: if we deviate from the 3mm disc size, users will not be able to do any sample preparation prior to use of the TEAM instrument. This is not desirable. • Size: Thickness: 0.5 mm in center, thicker to the sides, x & y will depend on design • Cartridge should be a kinematic fixture

  17. Specifications Currently Set (Continued 5) • Materials • Non-magnetic • Conductive • Stiff • Thermally stable • UHV-compatible/bakeable • Be? Cu-Be?

  18. Nano/Sub-Nanometer Scale Manipulation Control Mechanical Components Environment 1. Actuator -Piezo (No Stiction) 2. Feedback - Laser/Capacitance ~ 10 times better than target accuracy. 3. Control Technique - Coarse/Fine (with compensation) 1. Material - Stability - CTE (Super/Invar, Zerodur) - Residual Stress - Stiffness 2. Kinematics - ABBE error - Cosine error - Axis coupling effect 3. Part Accuracy - Surface Condition - Straightness - Dimensional accuracy 1. Vibration/Acoustic - Vibration isolation - Avoiding Eigen-modes 2. Thermal - Thermal inertia - Heat isolation - Minimize heat generation 3. Electro-magnetic - Shielding & Isolation - Avoid monitors & computers, noisy electric motors 4. Media for Sensors - Humidity, Air pressure, Temperature change

  19. Current Target Technical Issues improvement 5 ~ 10nm accuracy 0.05nm accuracy 5 ~ 10nm accuracy Actuator Better than 0.05nm (0.5 A) 1 nm resolution Feedback 0.01 nm (0.1 A) resolution Control Low CTE materials Thermal Low CTE materials and Compensation

  20. Electric field Target How to solve the problems Joint bearings (fine-motion) Laser/capacitance readback Coarse/Fine control Piezo actuation Bearings Stick-slip Error motion Flexures Continuous Small error Small workspace Laser 0.01nm resolution Capacitance 0.01nm resolution 5mm PZT 5mm workspace 0.5nm open loop resolution coarsemotion Target finemotion

  21. e System Design • Why do we need Nanometer accuracy for the Macro-scale components? • The guiding system directly effects the system overall accuracy. • The error amount should be within fine motion control region y-axis guide surface : Orthogonality : Straightness : ABBE error x-axis It’s not easy to get better than 0.1 mrad ABBE error with conventional machining. (when e=0.1mrad and r=50mm) error amount ( ) < fine motion travel range (1~10 microns)

  22. silicon µ-machining miniature machining meso machining Meso-scale machining: 10 µm ~ 1mm 10-3 10-4 10-5 10-6 [m] Critical dimensions

  23. Micro Milling, Drilling and Turning 100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002 Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair

  24. Examples Meso-Machining at LBL FIB Milling 17µm cutting tool 10µm gears in silicon Micro Turbine Blades 1mm 25µm channel in diamond 20µm channel in graphite

  25. X-axis stage Installation surface Sensor position 2-translational axis manipulation for FESEM FESEM Table With 5-DOF • Technical challenge • No-existing manipulation • collect light coming from the sample • Limited installation space • Following the table movement • Don’t hinder other instrument inside the chamber • Approach • Parabola mirror • Two axis stage • Piezo actuation • Step-like actuation for stability • Open loop control • Installation and Test Results • Positioning accuracy: 0.02mm • Easy user control with VisualBasic • No damage on vacuum grade • No X-ray through the stage Diamond turned mirror surface 5mm 10mm

  26. Installation and test of FESEM Stage 2-axis stage Monitor Control Panel FESEM Outside view Mirror engagement 0.5mm Hole on the parabola mirror Inside view Test result

  27. Control panel for FESEM Stage Software : VisualBasic Z-axis voltage level control X-axis voltage level control Stage aging time control +/-X axis feedrate control Auto-homing Z-axis control Stage pausing

  28. 2-rotational axis manipulation for TEM • Technical challenge • Sub m-radian accuracy with with 6.5mm shaft. • Two independent rotations • Attachment to the existing Goniometer • Approach • Piezo actuation • String type rotating mechanism • Jewel bearing • Minimization stick-slip • 3. Expected results • 0.6 mrad accuracy tilting (equivalent with 3micron linear displacement) • 0.03 mrad accuracy rotation • Smooth operation • No-jittering • Easy jog control (patent disclosure)

  29. Fluid Holder for JEOL 3010 (Mark Williamson)

  30. Modular Sample Holder for the JEOL 3010 Ti - 6Al4V Delrin Aluminum

  31. Other Ongoing Projects • Florescence Holder for the CM-300 • LLNL/Morris In-Situ Tensile Test Holder • Single Tilt Full Rotation Tomography Holder • IC Holder for Daan Hein 1mm Parabolic Mirror for TEM Sample Holder

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