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MicroOptoElectroMechanical Systems (MOEMS)

MicroOptoElectroMechanical Systems (MOEMS). Investigators: A. Feinerman , ECE; C. Megaridis , MIE Prime Grant Support: NASA, and DARPA. Standard deformable structures rely on spindly linkages to achieve the flexibility required for motion. Spindly structures are thermal insulators.

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MicroOptoElectroMechanical Systems (MOEMS)

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  1. MicroOptoElectroMechanical Systems (MOEMS) Investigators: A. Feinerman, ECE; C. Megaridis, MIE Prime Grant Support: NASA, and DARPA • Standard deformable structures rely on spindly linkages to achieve the flexibility required for motion. • Spindly structures are thermal insulators. • Tethered liquid drops provide electrical, and thermal conduction, as well as a restoring force/torque to mirror. 75 volts @ 300Hz with 35 mm actuation • tethered drops are super-deformable, large displacements at low voltages are possible • drops can be tethered by patterning the wetting properties of a surface • precision dispensing of Hg drops • self-alignment of ~50 mg mirrors. • Achieved reproducible piston motion • Achieved reproducible rotation • Used technique to make variable reflection display • Developing RF switch – liquids do not suffer from stiction.

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