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Use of HF and BOE in NanoFab

This training presentation provides guidelines for safely handling Hydrofluoric Acid (HF) and Buffered Oxide Etch (BOE) in the NanoFab. Topics covered include proper protective equipment, waste disposal, proper labeling and setup, emergency procedures, and MSDS information.

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Use of HF and BOE in NanoFab

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  1. N E Use of HF and BOE in NanoFab Training Presentation September 2007

  2. N E Use of HF and BOE in Nanofab • Only trained users may use HF or BOE • Visor, gloves and apron must be used when pouring or handling • Waste must be removed from beakers/baths with aspirator tube • Do NOT use glass around HF • Do NOT mix with other chemicals without prior approval and supervision.

  3. N E Use of HF and BOE in NanoFab • Do not cover beaker with metal foil or use with metal holders • Do NOT heat HF/BOE • Use dedicated tanks at acid hood for large volumes eg 1 liter or more • Use funnels for pouring; neutralize and clean up spills immediately

  4. N E Use of HF and BOE in NanoFab • BOE stands for buffered oxide etch • It is a mixture of NH4F and HF • Extra fluorine acts as a buffer to preserve etch rate due to load effects or bath aging • Very dangerous-same as HF • We use 6:1 (6 NH4F to 1 HF) • BOE/HF is one of the most useful chemicals in the semiconductor industry

  5. Use of HF and BOE in NanoFab • Many useful mixtures & applications of BOE and HF/H2O:

  6. N E Use of HF and BOE in NanoFab • Label the setup: • Use only in approved locations • Concentration/mixture • Your name and phone • Date & time poured • Date & time finished • Fill out log book for in-deck HF/BOE baths and label bath cover with mixture eg 10:1 H2O:HF, BOE 6:1 etc • Setups cannot remain longer than 24 hours • Exception: In deck HF tanks & Porous Si Setup

  7. N E Use of HF and BOE in NanoFab • Allowed locations for HF/BOE in NanoFab • In deck acid sink

  8. N E Use of HF and BOE in NanoFab • Know the safety procedure for exposure • Remove affected clothing • Wash with water • Apply calcium gluconate cream • See the Doctor • Report the incident • See attached detailed procedure

  9. N E Use of HF and BOE in NanoFab • In case of HF/BOE spill: • Wear gloves, visor and apron • Evacuate area • Neutralize with lime or neutraspray • Use spill towels or pillows to collect waste • Put waste in yellow bags and label it HF/BOE Hazardous Waste; Put it in Haz Waste Cabinet • Report spill to lab staff • Do NOT attempt to clean up large or unknown spills

  10. N E Use of HF and BOE in NanoFab • HF/BOE is extremely dangerous and can cause severe burns and even death. • HF/BOE attacks bone tissue by reacting with calcium in the bone • HF/BOE attacks most organs including the heart by disrupting Ca ions • HF/BOE in dilute concentrations may not even cause any pain initially but is easily absorbed through the skin to attack bone and other tissue

  11. N E Use of HF and BOE in NanoFab • NH4F MSDS DATA

  12. Section 1 - Product and Company Identification 244279 HYDROFLUORIC ACID 48% ACS REAGENT -Product Identification: 244279 HYDROFLUORIC ACID 48% ACS REAGENT Date of MSDS: 01/01/1997 Technical Review Date: 05/08/1998 FSC: 6550 NIIN: LIIN: 00F056013 Submitter: F BT Manufacturer's Name: SIGMA CHEMICAL COMPANY Post Office Box: 14508 Manufacturer's Address1: 3050 SPRUCE ST Manufacturer's Address2: SAINT LOUIS, MO 63178-5000 General Information Telephone: 314-771-5765/800-325-3010 Emergency Telephone: 314-771-5765/800-325-3010 Section 2 - Compositon/Information on Ingredients 244279 HYDROFLUORIC ACID 48% ACS REAGENT Ingredient Name: HYDROFLUORIC ACID, HYDROGEN FLUORIDE Ingredient CAS Number: 7664-39-3 Ingredient CAS Code: M RTECS Number: MW7875000 RTECS Code: M % Text: N/K % Enviromental Weight: Other REC Limits: 2.5 PPM OSHA PEL: N/K OSHA PEL Code: M OSHA STEL: OSHA STEL Code: ACGIH TLV: C 2.6 MG/CUM ACGIH TLV Code: M ACGIH STEL: N/P ACGIH STEL Code: EPA Reporting Quantity: 100 LBS DOT Reporting Quantity: 100 LBS Ozone Depleting Chemical: N N E Use of HF and BOE in NanoFab Sections 1 and 2 of HF MSDS

  13. Section 3 - Hazards Identification, Including Emergency Overview 244279 HYDROFLUORIC ACID 48% ACS REAGENT Health Hazards Acute & Chronic: FATAL IF INHALED, SWALLOWED/BY SKIN ABSORPTION. MATERIAL IS EXTREMELY DESTRUCTIVE TO TISSUE OF THE MUCOUS MEMBRANES & UPPER RESPIRATORY TRACT, EYES & SKIN. FATAL AS A RESULT OF SPASM, INFLAMMATION & E DEMA OF THE LARYNX & BRONCHI, CHEMICAL PNEUMONITIS/PULMONARY EDEMA. MAY AFFECT THE LIVER & KIDNEYS. POSSIBLE MUTAGEN. Signs & Symptoms of Overexposure: IRRITATION, INFLAMMATION, BURNING SENSATION, COUGHING, WHEEZING, LARYNGITIS, SHORTNESS OF BREATH, HEADACHE, NAUSEA, VOMITING Medical Conditions Aggravated by Exposure: N/K LD50 LC50 Mixture: N/P Route of Entry Indicators: Inhalation: YES Skin: YES Ingestion: YES Section 4 - First Aid Measures 244279 HYDROFLUORIC ACID 48% ACS REAGENT First Aid: EYES/SKIN: IMMEDIATELY FLUSH W/COPIOUS AMOUNTS OF WATER FOR 15 MINS. INHALATION: REMOVE TO FRESH AIR. GIVE CPR/OXYGEN IF NECESSARY. INGESTION: DON'T INDUCE VOMITING. IF CONSCIOUS AFTER INGESTION OF MA TERIAL, IMMEDIATELY GIVE 4-8 OUNCES OF MILK/WATER. OBTAIN MEDICAL ATTENTION IN ALL CASES. N E Use of HF and BOE in NanoFab Sections 3 and 4 of HF MSDS

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