ECR Deposition of Niobium
ECR Deposition of Niobium. ECR plasma principle Cavity deposition system prototype Surface treatment NbN surface coating. A-M. Valente, L. Phillips, H. Wang, A. Wu, R. Bundy, T. Goodman, R. Rimmer, C. Reece, Jefferson Lab G. Wu , Fermilab H. Padamsee, Cornell University.
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